POCl3 Refill Upgrade

HORIBA POCl3 Refill System

centrotherm introduces a POCl3 Auto Refill System in cooperation with HORIBA. The system is qualified for all atmospheric and low-pressure centrotherm diffusion systems.

One single system is capable of providing up to 20 process tubes (4 furnaces) with POCl3and minimizing handling steps and downtime, e.g. due to vessel exchange. It includes robust PFA bubblers and reduces consumption of unused POCl3 by up to 15%.


  • Integrated robust PFA bubblers instead of fragile quartz bubblers
  • Reduction of unused POCl3 by ~15%
  • Reduced POCl3 chemical costs
  • Minimized handling and downtime
  • Enhanced safety