E 1200
Horizontal furnace for R&D
The E 1200 small batch laboratory system supports the multiple process capability needs of a low volume production with high process performance. The centrotherm design is outstanding for high performance, small footprint and low cost of ownerhip while offering a high process flexibility required for multiple applications.
- Atmospheric, PECVD and LPCVD processes
- Process selectable chamber options available in 3 or 4 stack configurations
- Advanced water cooling system guarantees no thermal interference between the different process tubes
- Optional: automated boat loading
- Modular component design for ease of installation and start up
Processes
- Annealing
- Diffusion
- LPCVD
- Oxidation
- PECVD
Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.
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