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Polysilicon production
CVD Reactor
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Key equipment
Polysilicon production
CVD Reactor
Produces high purity polysilicon based on the Siemens process
STC-TCS Converter
Converts silicon tetrachloride (STC) to trichlorosilane (TCS)
Lab CVD Reactor
Secures a contamination-free process chain within the polysilicon production
Vent Gas Recovery System
Processes vent gases from CVD Reactor and STC-TCS Converter
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