Key equipment

Polysilicon production

CVD Reactor

Produces high purity polysilicon based on the Siemens process

CVD reactor

STC-TCS Converter

Converts silicon tetrachloride (STC) to trichlorosilane (TCS)

STC-TCS converter

Lab CVD Reactor

Secures a contamination-free process chain within the polysilicon production

Lab-CVD reactor

Vent Gas Recovery System

Processes vent gases from CVD Reactor and STC-TCS Converter

Vent gas recovery system