Lab CVD Reactor
Secures a contamination-free process chain within the polysilicon production
The centrotherm SiTec Lab CVD [Laboratory Chemical Vapour Deposition] Reactor is a key equipment to secure a contamination-free process chain within the polysilicon production process. It is used for process quality assurance as well as for process parameter optimization and is thus provided in two different versions: one for analysis of the polysilicon deposition process [quality type reactor] and one for small scale process optimization [technology type reactor].
The Quality Type Lab CVD Reactor is part of the quality control system of centrotherm’s silicon production process chain. It is specifically used for quality assurance of TCS [trichlorosilane] and other feeding materials used for polysilicon deposition. To ensure that no additional metallic contamination will influence the quality of the test deposition, the cylindrical inner bell jar is made of high purity quartz glass. The process pressure is significantly lower than in the technology type Lab CVD Reactor.
The Technology Type Lab CVD Reactor is used for process optimization. As the operation process pressure of the technology type Lab Reactor is the same as in the production CVD Reactor, the process parameters used for the production can be simulated and verified. Technological results can easily be transferred to industrial CVD Reactors. Its cylindrical inner bell jar is made of stainless steel in order to stand the operation pressure it is specified for.
Both types of reactors are designed as a comprehensive system in a cabinet with an integrated power supply, process gas distribution and control and integrated leakage gas sensors. The power supply is provided in a second cabinet.
- Complete Lab CVD Reactor system ready for operation
- Easy to use and operate
- High degree of automation
- Analytical tool for quality control and process optimization
- Excellent training equipment for operators
- Equipment delivered with spare parts and consumable package
- Commissioning support included
Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.