Vent Gas Recovery System
Processes vent gases from CVD Reactor and STC-TCS Converter
The centrotherm SiTec Vent Gas Recovery (VGR) System is specially designed to process vent gases generated from CVD Reactors and STC-TCS Converters during polysilicon production. The VGR separates these gases into three product streams to be reintroduced in different stages of the polysilicon production process:
- Recovered H2 to be re-used in the deposition and conversion process
- Recovered HCl to be re-used in the TCS synthesis
- Mixture of liquid chlorosilanes (TCS, STC) to be further separated by distillation and re-used in the deposition and conversion process
The centrotherm SiTec VGR System can be adapted to any production capacity.
The VGR System enables a closed-loop polysilicon production and provides highest recovery rates (> 99 %) for all compounds of the vent gas streams by applying ultra-low temperature processes.
To prevent contamination during the process and to ensure very high purity of polysilicon, the VGR is specially designed with selected construction materials. In addition, the use of special activated carbon ensures high purification of recovered hydrogen.
- Fully integrated VGR System package to separate vent gases
- Highest recovery rates for all mixtures of vent gases (> 99 %)
- Average power consumption of 1,650 kW (3,100 kW maximum)
- Optimized design reduces operating costs
- Low investment costs
- Guaranteed performance parameters
- TÜV-proven equipment
- Manufactured according to customer specified standards
- Commissioning, supervision and start-up by experienced centrotherm SiTec team
Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time
