Key equipment for solar cell production

Diffusion furnace

Tube furnace for diffusion applications in c-Si solar cell processing

High throughput diffusion furnace

Throughput optimized tube furnace for diffusion processes in c-Si solar cell processing

Throughput-optimized inline system for nitride deposition in c-Si solar cell processing

PECVD system

Batch-type system for passivation and nitride deposition in c-Si solar cell processing

Nitride system for process boat pre-coating after wet-chemical cleaning

Conveyor furnace for firing of metal contacts in c-Si solar cell processing

Fast firing furnace

Conveyor furnace for firing of metal contacts in c-Si solar cell processing

Conveyor furnace for drying of metallization paste in c-Si solar cell processing

For high-efficient laser applications in c-Si solar cell processing

R&D system

Batch-type system for R&D applications in c-Si solar cell processing