Drying furnace

Conveyor furnace for drying of metallization paste in c-Si solar cell processing

For drying of solar cell metallization paste centrotherm photovoltaics provides drying furnaces targeted for high volume production. Key features of centrotherm drying furnaces include high throughput and uptime, powerful drying capabilities, modular build-up. Air flows used for drying can be adjusted module-by-module precisely, which allows excellent drying process setup and control.
Our drying furnace comes with a powerful wafer cooling stage. Cooling is achieved by closed loop air flows and air to cooling water heat exchangers. This yields processed wafer delivery with nearly ambient temperature.
Optionally, the furnaces are available with exhaust condensers for exhaust gas cleaning.

  • Suitable for 5” and 6” wafers
  • Single- or dual-lane setup
  • Modular design supports precise process setup and control
  • Various belt variants available: flat, with edge-support standoffs, with regular stand-offs
  • Fully automatic work mode
  • High availability and long-term process and furnace stability
  • Quick and convenient cavity access for inspection and maintenance
  • SECS GEM interface, single wafer tracking
  • Horizontal integration with other metallization line equipment
Processes

  • Drying of metallization paste

Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.

  • Drying furnace
  • Belt drying furnace
  • Insight drying furnace
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