Fast firing furnace

Conveyor furnace for firing of metal contacts in c-Si solar cell processing

The centrotherm fast firing furnace is intended for burning out organic solvents and sintering the metallization paste. The furnace offers high throughput and premium process stability with excellent yield and uptime. The operator-friendly software and machine interface supports quick and simple function diagnosis and service access.
Furthermore, the furnace allows the realization of customer-specific requirements and the optionally integrated high-speed, high-efficiency dryer supports process integration.

  • High heat-up and cool-down rates allow advanced process control and steep temperature gradients
  • Iron-free transport belt (optional: wafer standoffs) and quartz glass belt support minimize process contamination
  • Detailed continuous process monitoring and control ensure highest output quality
  • Short-wave infrared radiators for a stable process environment with permanent function monitoring
  • Single- or dual-lane versions
  • Case water cooling and advanced thermal insulation for lowest facility heat footprint
  • In-situ belt cleaning (brushes, optional: ultrasonic)

Processes

  • Firing of front side metallization
  • Alloying of rear side contact
  • Overcompensation of n+ layer and gettering of metallic impurities (Al-BSF formation)
  • Release of hydrogen from SiN-layer for passivation of silicon defects
  • Optional: drying of metallization paste

Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.

  • Fast firing furnace
  • Solar cells in fast firing furnace
  • Fast firing furnace
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