High throughput diffusion furnace

The centrotherm high throughput diffusion furnace offers the best availa­ble phosphorus diffusion and allows a solid realization of high emitter resistivity. The design supports the multiple process capability needs for the manufacturing of crystalline solar cells with maximum capacity and excellent process performance.
The unique advantages of the batch-type system are the high flexibility towards varying production load and process sequence as well as the continued operation in case of tube maintenance or shut-down. Various configurations regarding process capability, capacity and automation level are available. 

• Throughput gain of 15 – 25 % compared to standard system
• Diffusion on both wafer sides (extended gettering effect of phosphorus improves material quality)
• High availability due to redundancy
• Highest cleanness (gas phase diffusion without residues)
• System configuration adjustable to production capacity (number of tubes, optional back-to-back loading)
• Fully automated boat handling guarantees maximized tube utilization
• Modular design allows easy installation and start-up
• Up to 5 independently operated stacked quartz tube reactor chambers
• No thermal interference between different tubes due to advanced water cooling system
• Minimized footprint and facility heat load reduce total cost of ownership

Processes

• Diffusion (POCl₃, BBr₃)
• Annealing
• Wet and dry oxidation (optional: DCE, HCl)
• Further processes upon request 

Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.