Nitride pre-coating system
Nitride system for process boat pre-coating after wet-chemical cleaning
The system is designed for silicon nitride pre-coating of graphite process boats after wet chemical cleaning. Using this newly developed external pre-coating system availability and throughput of the production equipment can be increased by 4 - 6 percent.
Ease of maintenance is ensured since the deposition is physically confined to the graphite boats holding the wafers. The process chamber is only marginally affected by parasitic deposition. Thus, chamber cleaning is reduced to yearly or bi-yearly tasks without notable impact on tool uptime.
- Increases productive time of PECVD systems
- Low total cost of ownership and Capex
- Fully automated process
- Single chamber system
- Manual loading by trolleys
- Suitable for all standard PECVD process boats
- Cycle time 4 h
- Small footprint
Processes
- Sin pre-coating of PECVD graphite boots
Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.
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