R&D system

The centrotherm R&D system meets the multifold requirements of research and development purposes in crystalline solar cell processing. In addition to the operation of small batches for R&D the system is suitable for production-sized batches for evaluation purposes.

The design is outstanding for high performance, small footprint and low total cost of ownership while offering a high process flexibility required for multiple applications.

• Up to 4 independently operated stacked quartz (optional: SiC) tube reactor chambers
• Process-selectable chamber options available in 2 to 4 stack configurations
• Clean automated boat loading (soft lander)
• Premium processing of small batches (R&D) and production-sized batches (evaluation)
• Advanced water cooling system prevents thermal interference between different tubes and consumption of clean room air
• Minimized facility heat load
• Modular design for ease of installation and start-up

Processes

• Atmospheric
  
  
  • Diffusion (POCl₃, BBr₃, optional: B₂H₆, PH₃)
  • Wet and dry oxidation (optional: DEC, HCl)
  • Contact sintering
  • Annealing
• Low pressure
  
  
  • PECVD
    • Oxide
    • Nitride
    • Oxinitride
  • LPCVD
    • Polysilicon (doped and undoped)
    • Silicon nitride
    • Oxide (TEOS, LTO, HTO, etc.)
    • Oxinitride

Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.