centrotherm thermal solutions to introduce new vertical furnace for batch production of 200 mm silicon wafers

SEMICON Europe - Stuttgart, Germany, 09.10.2007

SEMICON Europe

The centrotherm thermal solutions GmbH & Co. KG will present the "verticoo 200", a new, high-capacity vertical furnace for the batch production of 200 mm silicon wafers at the SEMICON Europe 2007. This international trade fair will be open October 9 through 11 at the "Neue Messe Stuttgart". centrotherm thermal solutions will await guests and visitors at Stand 1024 in Hall 1.

The new single-tube vertical furnace "verticoo 200" is a double boat system with fully automated wafer loading system, and is designed for maximum throughput and an optimum price-performance-ratio. The integrated storage for up to 20 wafer cassettes makes automatic (un)loading processes of entire boats possible.

"Depending on the respective process, up to 175 wafers per batch can be processed", says Dr. Harald Binder, CEO of centrotherm thermal solutions GmbH & Co. KG in Blaubeuren. The revised design of the process chamber and the heating system allow a high degree of flexibility for all standard processes – in the normal pressure as well as in the low pressure range.

"We continuously strive to update and enhance our tried and approved technology so that our customers can increase the efficiency of the production", emphasizes CEO Dr. Harald Binder. The clientele is to a large part made up of power semiconductor producers and automotive manufacturers, and both groups are currently investing heavily in state-of-the-art technology. Dr. Binder: "Our new products are perfect for the current market situation".

The vertical furnace "verticoo 200" is designed for side-by-side-installation and sports an extremely small footprint of less than 3 sqm. The "verticoo 200" is easy to service, offering safe and reliable use for many process steps in the semiconductor fabrication – for example: annealing, diffusion or oxidation. Even LPCVD processes such as polysilicon, doped polysilicon, silicon nitride, silicon oxynitride, TEOS, HTO and SIPOS are possible.

"In addition to the "verticoo 200", we will show further production program highlights on the SEMICON Europe in Stuttgart", promises Harald Binder. Among others, the newest generation of VLO20 vacuum soldering systems, which has been thoroughly revamped and is now state-of-the-art, boasting a lamp heating system for an extremely fast heat-up rate.

For more than 30 years, centrotherm thermal solutions has designed, produced and sold high-end equipment as well as components for thermal semiconductor and photovoltaic processes. The range of products includes horizontal and vertical furnaces, conveyor furnaces, vacuum soldering ovens as well as process technology services. The photovoltaic equipment is exclusively marketed by the sister company centrotherm photovoltaics AG.

centrotherm thermal solutions GmbH + Co. KG

Dr. Harald Binder
Johannes-Schmid-Straße 8
89143 Blaubeuren

T +49 7344 9186-913
F +49 7344 9186-387
E-Mail
www.centrotherm-ts.de