Production Equipment

Vertical wafer process system for mini-batch applications

Vertical wafer process system for mini-batch applications

    Processes

    • Atmospheric Processes
    • Annealing
    • Oxidation
    • Diffusion
    • LPCVD
    • PECVD
R&D Wafer Process System: c.VERTICOO Mini

RTP equipment for compound semiconductor and silicon

RTP equipment for compound semiconductor and silicon

    Processes

    • Ion implant annealing
    • Silicide formation (Ti, Co, Ni, Pt, etc.)
    • Oxidation
    • PSG reflow
    • Metallization annealing
    • Further applications
Rapid Thermal Processing System RTP RTO RTA: c.RAPID 200