Horizontal furnace system for R&D and small-scale production
The c.E1200 small batch laboratory system supports the multiple process capability needs of a low volume production with high process performance.
The centrotherm design is outstanding for high performance, small footprint and low cost of ownerhip while offering a high process flexibility required for multiple applications.
- Atmospheric, PECVD and LPCVD processes
- Process selectable chamber options available
- Flatzone 300mm
- Advanced water cooling system guarantees no thermal interference between different process tubes
- Modular component design for ease of installation and start up in clean room facilities
- Integrated lift for automated boat handling
- Integrated boat buffering and cooling system
- Fully automated Wafer-Transfer-System with Cassette-to-Cassette Handling