Vertical wafer process system for mass production
Designed for high volume production with a maximum throughput rate and a high degree of flexibility, c.VERTICOO 200 is suitable for all standard atmospheric and low pressure CVD processes.
The single tube set-up with dual boat logistics is optimized for minimum handling time as well as low cost of ownership with low maintenance costs.
- Up to 150 process wafers per batch
- Auto alignment
- Dual boat logistics
- Water cooled heating cassette
- Small footprint
- Side by side installation possible