Production Equipment

Inline furnace for fast firing and sintering of metallization

Inline furnace for fast firing and sintering of metallization

    Processes

    • Fast firing of front side metallization
    • Alloying of rear side contact
    • Drying of metallization paste
Fast Firing Conveyor Belt Furnace with Dryer: c.FIRE

Solar cell regeneration furnace for LID reduction

Solar cell regeneration furnace for the reduction of light induced degradation (LID)

    Processes

    • Solar cell regeneration    
    • Passivation of B-O-defects
Solar Cell Regeneration for LID Reduction: c.REG

Batch-type system for R&D solar cell processing

Batch-type system for R&D c-Si solar cell applications

    Processes

    • Atmospheric
      Diffusion | Oxidation | Sintering | Annealing
    • Low Pressure
      Oxide | Nitride | Oxinitride
    • LPCVD
      Polysilicon | Siliziumnitride | Oxide | Oxinitride
R&D System Diffusion Oxidation CVD Processes: c.LAB