c.VERTICOO 200

c.VERTICOO 200: Vertical Wafer Process System
c.VERTICOO 200: Vertical Wafer Process System
c.VERTICOO 200: Vertical Wafer Process System

Vertical wafer process system for mass production

Designed for high volume production with a maximum throughput rate and a high degree of flexibility, c.VERTICOO 200 is suitable for all standard atmospheric and low pressure CVD processes.

The single tube set-up with dual boat logistics is optimized for minimum handling time as well as low cost of ownership with low maintenance costs.

Features

  • Up to 150 process wafers per batch
  • Auto alignment
  • Dual boat logistics
  • Water cooled heating cassette
  • Small footprint
  • Side by side installation possible

Processes

  • Annealing
  • Diffusion
  • LPCVD
  • Oxidation